Thin Film Deposition

A Brief Overview of Thin Films

Atomic force microscopy (AFM) is a scanning probe microscopy technique that uses a sharp tip to image a sample. Inspired by developments in stylus profilometry the first AFM was developed in the 1980s by Gerd Binnig, Calvin Quate, and Christoph Gerber. This type of microscopy was (and remains) revolutionary as it now enables atomic resolution without the expensive high-vacuum systems and complicated optics required by high-resolution electron and optical microscopes. AFM can image almost any type of sample, enables collection of three dimensional datasets and can be modified to simultaneously collect electrical, magnetic, mechanical, chemical, and topographic data. AFM has been used for everything from identifying individual atoms in semiconductor films to imaging individual macromolecules in biological cells to building and manipulating nanostructures. In thin film research AFM is often combined with electrical and spectroscopic measurements to study and improve a wide range of materials and devices. For more information about the incredible versatility and scope of this technique we recommend the textbook Atomic Force Microscopy by Peter Eaton and Paul West and the extensive webinar series and application notes available from the manufacturer of our instrument - Bruker

About Our Instruments - Vapour Deposition

The Angstrom EvoVac Physical Vapour Deposition System

Atomic Force Microscopy features prominently in the LRG’s research. We use AFM to study thin film characteristics including thickness, nanoscale morphology, temperature responsiveness, quantitative mechanical properties, and more. As one of our primary workhorses this tool receives dedicated support from Dr. Joseph Manion who has over 10 years of experience with the Icon.

About Our Instruments - The Liquids Lineup

Standard Spin Coating - The Laurell WS-650Mz-23NPPB and Ossila L2001A3-U1

Atomic Force Microscopy features prominently in the LRG’s research. We use AFM to study thin film characteristics including thickness, nanoscale morphology, temperature responsiveness, quantitative mechanical properties, and more. As one of our primary workhorses this tool receives dedicated support from Dr. Joseph Manion who has over 10 years of experience with the Icon.

Automation in Action - The Musashi SM200 Drop Coater

Atomic Force Microscopy features prominently in the LRG’s research. We use AFM to study thin film characteristics including thickness, nanoscale morphology, temperature responsiveness, quantitative mechanical properties, and more. As one of our primary workhorses this tool receives dedicated support from Dr. Joseph Manion who has over 10 years of experience with the Icon.

From Lab Scale to Scale Up - The Erichsen Coatmaster 510

Atomic Force Microscopy features prominently in the LRG’s research. We use AFM to study thin film characteristics including thickness, nanoscale morphology, temperature responsiveness, quantitative mechanical properties, and more. As one of our primary workhorses this tool receives dedicated support from Dr. Joseph Manion who has over 10 years of experience with the Icon.

System Specs

Vertical Resolution: ~ 1 nm

Features Resolution: ~ 2 nm (depending on probe and scan size)

Scan Area:

  • Icon: Up to 80 x 80 um

  • FastScan: Up to 30 x 30 um

Typical Runtime per Sample:

  • Icon: 10 minutes per scan (standard imaging)

  • FastScan: 5 minutes per scan (standard imaging)

Running Samples with the LRG

Samples should be provided on a flat substrate (typically a silicon wafer or glass slide). Samples that require special mounting may take longer to prepare and are usually affixed to small metal disks using adhesives which are then magnetically mounted on the microscope stage.

We typically require confirmation that a sample is well below the vertical limit of the scanhead being used before we start imaging (4 um for the FastScan and 12 um for the Icon). For features larger than 2 microns in height we recommend using our 2D stylus profilometer or optical microscope.

Some experiments may require a specific scanhead and may require changing the instrument configuration. We also have a wide range of probes that can be selected based on the experimental requirements. If you have any insight into your sample modulus or any restrictions related to subsequent analysis or sample integrity please contact us to discuss our options for low-spring constant probes, fine-tip resolution probes, and non-destructive imaging options.

Thin Film Fabrication

References

  1. List of references